All-electrochemical synthesis of submicrometer Cu structures on electrochemically machined p-Si substrates

Chemistry of Materials

Volumn 17, Issue 26, 2005, Pages 6755-6760

  Trimmer, Andrew L ^a   Maurer, Joseph J ^a   Schuster, Rolf ^b   Zangari, Giovanni ^c   Hudson, John L ^a  

^a University of Virginia   (United States)

^b DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^c UNIVERSITY OF VIRGINIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMICAL MACHINING; NANOSECOND VOLTAGE PULSES; P-SI SUBSTRATES; SUBMICROMETER CU STRUCTURES;

COPPER; ELECTRIC POTENTIAL; ELECTRODEPOSITION; NANOSTRUCTURED MATERIALS; SEMICONDUCTOR MATERIALS; SILICON;

ELECTROCHEMISTRY;

EID: 30744434124     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm051208s     Document Type: Article

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