Photoinduced electrochemical deposition of Cu on p-type Si substrates

Physical Review B - Condensed Matter and Materials Physics

Volumn 69, Issue 3, 2004, Pages

  Scheck, C ^a   Liu, Y K ^a   Evans, P ^a   Schad, R ^a   Bowers, A ^b   Zangari, G ^c   Williams, J R ^d   Issacs Smith, T F ^d  

^a University of Alabama   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

^c University of Virginia   (United States)

^d AUBURN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; SILICON;

ARTICLE; DISSOLUTION; ELECTROCHEMICAL DEPOSITION; ELECTROCHEMISTRY; FRACTAL ANALYSIS; ILLUMINATION; LASER; LIFESPAN; OXIDATION; PHOTOREACTIVITY; PRECIPITATION; SEMICONDUCTOR; STRUCTURE ANALYSIS;

EID: 1442301775     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.69.035334     Document Type: Article

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