Accuracy analysis of the estimated process yield based on Spk

Quality and Reliability Engineering International

Volumn 20, Issue 4, 2004, Pages 305-316

  Pearn, W L ^a   Chuang, C C ^b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b R and D Center for SCM   (Taiwan)

Author keywords

Process yield measure; Relative bias; Relative mean square error

Indexed keywords

APPROXIMATION THEORY; COMPUTATIONAL METHODS; COMPUTER SIMULATION; DATA ACQUISITION; DATA REDUCTION; ERROR ANALYSIS; ESTIMATION; PISTONS;

PROCESS YIELD MEASURES; RELATIVE BIAS; RELATIVE MEAN SQUARE ERROR;

PROCESS CONTROL;

EID: 2942738983     PISSN: 07488017     EISSN: None     Source Type: Journal    
DOI: 10.1002/qre.544     Document Type: Article

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