Low resistance Ni-Zn solid solution/Pd ohmic contacts to p-type GaN

Semiconductor Science and Technology

Volumn 19, Issue 6, 2004, Pages 669-672

  Song, June O ^a   Leem, Dong Seok ^a   Seong, Tae Yeon ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; NICKEL ALLOYS; OHMIC CONTACTS; SEMICONDUCTOR QUANTUM WELLS; SOLID SOLUTIONS;

BUFFERED OXIDE ETCH (BOE); CIRCULAR TRANSFER LENGTH METHOD (CTLM); CONTACT RESISTANCE; DOPANTS;

GALLIUM NITRIDE;

EID: 2942556704     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/19/6/001     Document Type: Article

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