Dispatching of overhead hoist vehicles in a fab intrabay using a multimission-oriented controller

International Journal of Advanced Manufacturing Technology

Volumn 27, Issue 7-8, 2006, Pages 824-832

  Kuo, Chung Hsien ^a   Huang, Chien Sheng ^a  

^a CHANG GUNG UNIVERSITY   (Taiwan)

Author keywords

Fuzzy logic; Intrabay behaviors; Manufacturing modeling and simulation; Multimission oriented dispatcher; Overhead hoist transport

Indexed keywords

AUTOMATION; COLLISION AVOIDANCE; FUZZY SETS; MATHEMATICAL MODELS; PRODUCTION ENGINEERING; SILICON WAFERS;

INTRABAY BEHAVIORS; MANUFACTURING MODELING AND SIMULATION; MULTIMISSION-ORIENTED DISPATCHER; OVERHEAD HOIST TRANSPORT;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 29344456481     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-004-2244-y     Document Type: Article

References (14)

1. Bahri N, Reiss J, Doherty B (2001) A comparison of unified vs. segregated automated material handling systems for 300 mm fabs. In: Proceedings of the IEEE International Symposium on Semiconductor Manufacturing, pp 3-6
2. Chen JH, Fu LC, Lin MH, Huang AC (2001) Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for wafer fabrication. IEEE Trans Robot Automat 17:619-636
3. Fu MS, Liad DY (2001) An effective OHT dispatch policy for 300 mm AMHS management. In: Proceedings of 2001 SEMI Conference, SEMICON Taiwan 99:35-41
4. Jang JSR, Sun CT, Mizutani E (1997) Neuro-fuzzy and soft computing - a computational approach to learning and machine intelligence. Prentice-Hall, New York
5. Jeng MD, Xie X (2001) Modeling and analysis of semiconductor manufacturing systems with degraded behavior using Petri nets and siphons. IEEE Trans Robot Automat 17:576-588
6. Jeng MD, Xie X, Chou SW (1998) Modeling, qualitative analysis, and performance evaluation of the etching area in a IC wafer fabrication system using Petri net. IEEE Trans Semicond Manuf 11(3):358-373
7. Kaempf U (1997) Automated wafer transport in the wafer fab. In: Proceedings of the IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp 356-361
8. Kuo CH, Wang CH. Huang K.W (2003) Behavior modeling and control of 300 mm fab intrabays using distributed agent oriented Petri net. IEEE Trans SystMan Cybern 33(5):641-648
9. Lin S Y, Huang HP (1998) Modeling and emulation of a furance in IC fab based on colored-timed Petri net. IEEE Trans Semicond Manuf 11(3):410-420
10. Mackulak GT, Savory P (2001) A simulation-based experiment for comparing AMHS performance in a semiconductor fabrication facility. IEEE Trans Semicond Manuf 14(3):273-280
11. Mittler M, Schoemig AK (1999) Comparison of dispatching rules for semiconductor manufacturing using large facility models. In: Winter Simulation Conference Proceedings 1:709-713
12. Srinivasan RS (1998) Modeling and performance analysis of cluster tools using Petri net. IEEE Trans Semicond Manuf 11(3):394-403
13. Zuberek WM (2001) Timed Petri nets in modeling and analysis of cluster tools. IEEE Trans Robot Automat 17:562-575
14. AutoSimulations Division (2001) AutoMod user's manual. Books Automation, Inc., Utah