Automated wafer transport in the wafer fab

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1997, Pages 356-361

  Kaempf, Ulrich ^a  

^a HEWLETT PACKARD COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPETITION; COMPUTER SIMULATION; FACTORY AUTOMATION; MATERIALS HANDLING; PROCESS CONTROL; SILICON WAFERS;

AUTOMATED WAFER TRANSPORT; WAFER FAB;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031355033     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)