Scatter analysis of optical components from 193 nm to 13.5 nm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5878, Issue , 2005, Pages 1-9

  Schröder, Sven ^a   Kamprath, Mathias ^a   Gliech, Stefan ^a   Duparré, Angela ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Angle resolved scattering; Coatings; DUV; EUV; Light scattering; Multilayer; Total scattering

Indexed keywords

DIELECTRIC DEVICES; LIGHT SCATTERING; LITHOGRAPHY; MULTILAYERS; OPTICAL COATINGS;

ANGLE RESOLVE SCATTERING; DUV; EUV; TOTAL SCATTERING;

THIN FILMS;

EID: 29244470551     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.616423     Document Type: Conference Paper

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