EUV/soft X-ray multilayer optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5645, Issue , 2005, Pages 289-298

  Yulin, Sergiy ^a   Feigl, Torsten ^a   Benoit, Nicolas ^a   Kaiser, Norbert ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Barrier layers; Broadband mirror; EUV; Interface engineered mirrors; Laterally graded coatings; Mo Si; Narrowband mirror; Thermal stability

Indexed keywords

BANDWIDTH; COATINGS; INTERFACES (MATERIALS); LIGHT REFLECTION; MAGNETRON SPUTTERING; MICROSTRUCTURE; MIRRORS; MOLYBDENUM; OPTICAL PROPERTIES; SILICON; THERMODYNAMIC STABILITY; ULTRAVIOLET RADIATION; X RAY OPTICS;

BARRIER LAYERS; BROADBAND MIRROR; EUV; INTERFACE-ENGINEERED MIRRORS; LATERALLY GRADED COATINGS; MO/SI; NARROWBAND MIRROR;

MULTILAYERS;

EID: 20044385101     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.579520     Document Type: Conference Paper

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