Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions

Applied Optics

Volumn 44, Issue 29, 2005, Pages 6093-6107

  Schröder, Sven ^a   Gliech, Stefan ^a   Duparré, Angela ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; MULTILAYERS; OPTICAL DEVICES; THIN FILMS;

BACKSCATTERING LEVELS; OPTICAL COMPONENTS; SCATTERING ANALYSIS;

LIGHT SCATTERING;

EID: 27844531025     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.44.006093     Document Type: Article

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