Deep-ultraviolet micro-Raman investigation of surface defects in a 4H-SiC homoepitaxially grown film

Applied Physics Letters

Volumn 87, Issue 24, 2005, Pages 1-3

  Tomita, Takuro ^a   Matsuo, Shigeki ^a   Okada, Tatsuya ^a   Kimoto, Tsunenobu ^b   Matsunami, Hiroyuki ^b   Mitani, Takeshi ^c   Nakashima, Shin Ichi ^c  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

^b KYOTO UNIVERSITY   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; EPITAXIAL GROWTH; PARAMETER ESTIMATION; PHONONS; RAMAN SPECTROSCOPY; SILICON CARBIDE;

ACOUSTIC PHONONS; COMET DEFECTS; OPTICAL PHONONS; SURFACE DEFECTS;

ULTRAVIOLET RADIATION;

EID: 28944451206     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2142080     Document Type: Article

References (17)

1. T. Kimoto, T. Urushidani, S. Kobayashi, and H. Matsunami, IEEE Electron Device Lett. 14, 548 (1993).
2. S. Onda, R. Kumar, and K. Hara, Phys. Status Solidi A 162, 369 (1997).
3. W. von Muench and E. Pettenpaul, J. Appl. Phys. 48, 4823 (1997).
4. W. von Muench and I. Pfaffeneder, J. Appl. Phys. 48, 4831 (1997).
5. G. A. Slack, J. Appl. Phys. 35, 3460 (1964).
6. C. Hallin, A. O. Konstantinov, B. Ṕcz, O. Kordina, and E. Janźn, Diamond Relat. Mater. 6, 1297 (1997).
7. A. Fissel, B. Schröter, U. Kaiser, and W. Richter, Appl. Phys. Lett. 77, 2418 (2000).
8. T. Okada, T. Kimoto, K. Yamai, H. Matsunami, and F. Inoko, Mater. Sci. Eng., A 361, 67 (2003).
9. L. Scaltrito, S. Porro, M. Cocuzza, F. Giorgis, C. F. Pirri, P. Mandracci, C. Ricciardi, S. Ferrero, C. Sgorlon, G. Richieri, L. Merlin, A. Castaldini, A. Cavallini, and L. Polenta, Mater. Sci. Eng., B 102, 298 (2003).
10. C. Sartel, C. Balloud, V. Soulìre, S. Juillaguet, J. Dazord, Y. Monteil, J. Camassel, and S. Rushworth, Mater. Sci. Forum 457-460, 217 (2004).
11. H. R. Philipp, Phys. Rev. 111, 440 (1958).
12. T. Tomita, S. Saito, M. Baba, M. Hundhausen, T. Suemoto, and S. Nakashima, Phys. Rev. B 62, 12896 (2000).
13. S. Nakashima, H. Okumura, T. Yamamoto, and R. Shimizu, Appl. Spectrosc. 58, 224 (2004).
14. S. Nakashima, J. Phys.: Condens. Matter 16, S25 (2004).
15. S. Nakashima, T. Yamamoto, A. Ogura, K. Uejima, and T. Yamamoto, Appl. Phys. Lett. 84, 2533 (2004).
16. H. Matsunami and T. Kimoto, Mater. Sci. Eng., R. 20, 125 (1997).
17. S. Nakashima and H. Harima, Phys. Status Solidi A 162, 39 (1997).