SCOPUS 정보 검색 플랫폼

Applied Physics A: Materials Science and Processing

Volumn 82, Issue 2, 2006, Pages 275-280

Kinetics of laser-induced oxidation of silicon near room temperature

(3) Osipov, A V a Patzner, P b Hess, P b

a INSTITUTE OF PROBLEMS OF MECHANICAL ENGINEERING (Russian Federation)

b UNIVERSITY OF HEIDELBERG (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; COMPOSITION; ELLIPSOMETRY; LASER BEAM EFFECTS; OXIDATION; OXYGEN; REACTION KINETICS; REAL TIME SYSTEMS; SILICA;

LASER-INDUCED OXIDATION; ROOM TEMPERATURE;

ULTRATHIN FILMS;

EID: 28544448520 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-005-3415-x Document Type: Article

Times cited : (19)

References (45)

1
- 28544437310
- T. Nakanishi, S. Ohkubo, Proc. Electrochem. Soc. 96, 316 (1996)
- (1996) Proc. Electrochem. Soc. , vol.96 , pp. 316
- Nakanishi, T.¹ Ohkubo, S.²

2
- 0037453652
- L. Hong, H. Sugimura, T. Furukawa, O. Takai, Langmuir 19, 1966 (2003)
- (2003) Langmuir , vol.19 , pp. 1966
- Hong, L.¹ Sugimura, H.² Furukawa, T.³ Takai, O.⁴

3
- 0001572256
- A. Pusel, U. Wetterauer, P. Hess, Phys. Rev. Lett. 81. 645 (1998)
- (1998) Phys. Rev. Lett. , vol.81 , pp. 645
- Pusel, A.¹ Wetterauer, U.² Hess, P.³

4
- 28544435382
- A. Pusel, P. Hess. Surf. Sci. 74, 433 (1999)
- (1999) Surf. Sci. , vol.74 , pp. 433
- Pusel, A.¹ Hess, P.²

5
- 0028368152
- A. Kazor, I.W. Boyd. J. Appl. Phys. 75, 227 (1994)
- (1994) J. Appl. Phys. , vol.75 , pp. 227
- Kazor, A.¹ Boyd, I.W.²

6
- 0000693260
- J.-Y. Zhang, I.W. Boyd, Appl. Phys. Lett. 71, 2964 (1997)
- (1997) Appl. Phys. Lett. , vol.71 , pp. 2964
- Zhang, J.-Y.¹ Boyd, I.W.²

7
- 0033100912
- G.D. Wilk. B. Brar, IEEE Electr. Device L. 20, 132 (1999)
- (1999) IEEE Electr. Device L. , vol.20 , pp. 132
- Wilk, G.D.¹ Brar, B.²

8
- 0001371175
- A. Stesemans, V.V. Afanas'ev, Appl. Phys. Lett. 77, 1469 (2000)
- (2000) Appl. Phys. Lett. , vol.77 , pp. 1469
- Stesemans, A.¹ Afanas'Ev, V.V.²

9
- 0034498075
- N. Kaliwoh, J.-Y. Zhang, I.W. Boyd, Appl. Surf. Sci. 168, 288 (2000)
- (2000) Appl. Surf. Sci. , vol.168 , pp. 288
- Kaliwoh, N.¹ Zhang, J.-Y.² Boyd, I.W.³

10
- 0033323831
- T. Saitoh, D. Kobayashi, D. Kimura. K. Asai, Mater. Res. Soc. Symp. Proc. 569, 101 (1999)
- (1999) Mater. Res. Soc. Symp. Proc. , vol.569 , pp. 101
- Saitoh, T.¹ Kobayashi, D.² Kimura, D.³ Asai, K.⁴

11
- 0141633753
- A. Fukano, H. Oyanagi, J. Appl. Phys. 94, 3345 (2003)
- (2003) J. Appl. Phys. , vol.94 , pp. 3345
- Fukano, A.¹ Oyanagi, H.²

12
- 0037443174
- Q. Fang, J.-Y. Zhang, I.W. Boyd, Appl. Surf. Sci. 208-209, 369 (2003)
- (2003) Appl. Surf. Sci. , vol.208-209 , pp. 369
- Fang, Q.¹ Zhang, J.-Y.² Boyd, I.W.³

13
- 19744369443
- P. Patzner, A.V. Osipov, P. Hess, Appl. Surf. Sci. 247, 204 (2005)
- (2005) Appl. Surf. Sci. , vol.247 , pp. 204
- Patzner, P.¹ Osipov, A.V.² Hess, P.³

14
- 84929177658
- Y.J. Chabal, O.S. Higashi, K. Raghavachari, VA. Burrows, J. Vac. Sci. Technol. A 7, 2104 (1989)
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 2104
- Chabal, Y.J.¹ Higashi, O.S.² Raghavachari, K.³ Burrows, V.A.⁴

15
- 0002809274
- W. Kern. Semicond. Int. 94, 94 (1984)
- (1984) Semicond. Int. , vol.94 , pp. 94
- Kern, W.¹

16
- 0000683257
- D.E. Aspnes, A.A. Studna, E. Kinsbron, Phys. Rev. B 29, 768 (1984)
- (1984) Phys. Rev. B , vol.29 , pp. 768
- Aspnes, D.E.¹ Studna, A.A.² Kinsbron, E.³

17
- 0034667083
- S. Adachi, H. Mori, Phys. Rev. B 62, 10 158 (2000)
- (2000) Phys. Rev. B , vol.62
- Adachi, S.¹ Mori, H.²

18
- 0000822815
- J.J. Lin, D.W. Hwang, Y.T. Lee, X. Yang. J. Chem. Phys. 109. 1758 (1998)
- (1998) J. Chem. Phys. , vol.109 , pp. 1758
- Lin, J.J.¹ Hwang, D.W.² Lee, Y.T.³ Yang, X.⁴

19
- 0018496263
- D.E. Aspnes, J.B. Theeten, J. Appl. Phys. 50, 4928 (1979)
- (1979) J. Appl. Phys. , vol.50 , pp. 4928
- Aspnes, D.E.¹ Theeten, J.B.²

20
- 1642621158
- B.E. Deal, A.S. Grove, J. Appl. Phys. 36, 3770 (1965)
- (1965) J. Appl. Phys. , vol.36 , pp. 3770
- Deal, B.E.¹ Grove, A.S.²

21
- 0024715571
- N.F. Mott, S. Rigo, F. Rochet, A.M. Stoneham. Philos. Mag. B 60, 189 (1989)
- (1989) Philos. Mag. B , vol.60 , pp. 189
- Mott, N.F.¹ Rigo, S.² Rochet, F.³ Stoneham, A.M.⁴

22
- 0141608052
- J. Lambers, P. Hess, J. Appl. Phys. 94, 2937 (2003)
- (2003) J. Appl. Phys. , vol.94 , pp. 2937
- Lambers, J.¹ Hess, P.²

23
- 36849141225
- Y. Tanaka, E.C.Y. Inn, K. Watanabe, J. Chem. Phys. 21, 1651 (1953)
- (1953) J. Chem. Phys. , vol.21 , pp. 1651
- Tanaka, Y.¹ Inn, E.C.Y.² Watanabe, K.³

24
- 0031552925
- .J.B. Nee, P.C. Lee, J. Phys. Chem. A 101, 6653 (1997)
- (1997) J. Phys. Chem. A , vol.101 , pp. 6653
- Nee, J.B.¹ Lee, P.C.²

25
- 0004195004
- Wiley, New York
- H. Okabe, Photochemistry of Small Molecules (Wiley, New York 1978)
- (1978) Photochemistry of Small Molecules
- Okabe, H.¹

26
- 0001189328
- Z. Cui, J.M. Madsen, C.G. Takoudis, J. Appl. Phys. 87, 8181 (2000)
- (2000) J. Appl. Phys. , vol.87 , pp. 8181
- Cui, Z.¹ Madsen, J.M.² Takoudis, C.G.³

27
- 0026863467
- J.R. Engstrom, D.J. Bonser. T. Engel, Surf. Sci. 268, 238 (1992)
- (1992) Surf. Sci. , vol.268 , pp. 238
- Engstrom, J.R.¹ Bonser, D.J.² Engel, T.³

28
- 0000421399
- T. Hoshino, Phys. Rev. B 59, 2332 (1999)
- (1999) Phys. Rev. B , vol.59 , pp. 2332
- Hoshino, T.¹

29
- 27844452113
- D.S. Hacker, S.A. Marshall, M. Steinberg, J. Chem. Phys. 35, 1788 (1961)
- (1961) J. Chem. Phys. , vol.35 , pp. 1788
- Hacker, D.S.¹ Marshall, S.A.² Steinberg, M.³

30
- 0031355657
- M. Balat. M. Czerniak, J.M. Badie, Appl. Surf. Sci. 120, 225 (1997)
- (1997) Appl. Surf. Sci. , vol.120 , pp. 225
- Balat, M.¹ Czerniak, M.² Badie, J.M.³

31
- 0001527475
- E.T. Ryan, E. Weitz, J. Chem. Phys. 99, 8628 (1993)
- (1993) J. Chem. Phys. , vol.99 , pp. 8628
- Ryan, E.T.¹ Weitz, E.²

32
- 0026961976
- M.A. Lamkin. F.L. Riley, R.J. Fordham, J. Eur. Ceram. Soc. 10. 347 (1992)
- (1992) J. Eur. Ceram. Soc. , vol.10 , pp. 347
- Lamkin, M.A.¹ Riley, F.L.² Fordham, R.J.³

33
- 28544432963
- R.A.B. Devine, J.J. Capponi, J. Arndt. Phys. Rev. B 35, 770 (1987)
- (1987) J. Arndt. Phys. Rev. B , vol.35 , pp. 770
- Devine, R.A.B.¹ Capponi, J.J.²

34
- 0009685729
- D.R. Hamann, Phys. Rev. Lett. 81, 3447 (1998)
- (1998) Phys. Rev. Lett. , vol.81 , pp. 3447
- Hamann, D.R.¹

35
- 0041880452
- T. Hoshino, Jpn. J. Appl. Phys. 42, 3560 (2003)
- (2003) Jpn. J. Appl. Phys. , vol.42 , pp. 3560
- Hoshino, T.¹

36
- 0023581543
- D.A. Mantell, T.E. Orlowski, Mater. Res. Soc. Symp. Proc. 74, 141 (1987)
- (1987) Mater. Res. Soc. Symp. Proc. , vol.74 , pp. 141
- Mantell, D.A.¹ Orlowski, T.E.²

37
- 0038889298
- E.M. Young, W.A. Tiller, Appl. Phys. Lett. 50, 46 (1987)
- (1987) Appl. Phys. Lett. , vol.50 , pp. 46
- Young, E.M.¹ Tiller, W.A.²

38
- 0342405957
- K. Uno, A. Namiki, S. Zaima, T. Nakamura, N. Ohtake, Surf. Sci. 193, 321 (1988)
- (1988) Surf. Sci. , vol.193 , pp. 321
- Uno, K.¹ Namiki, A.² Zaima, S.³ Nakamura, T.⁴ Ohtake, N.⁵

39
- 0042211739
- T.E. Orlowski, D. A. Mantell, J. Appl. Phys. 64, 4410 (1988)
- (1988) J. Appl. Phys. , vol.64 , pp. 4410
- Orlowski, T.E.¹ Mantell, D.A.²

40
- 0348080449
- A. Dolique, A.M. Reader, .J. Non-Cryst. Solids 187, 29 (1995)
- (1995) J. Non-cryst. Solids , vol.187 , pp. 29
- Dolique, A.¹ Reader, A.M.²

41
- 14344272697
- Y.-G. Jin. K.J. Chang. Phys. Rev. Lett. 86, 1793 (2001)
- (2001) Phys. Rev. Lett. , vol.86 , pp. 1793
- Jin, Y.-G.¹ Chang, K.J.²

42
- 33749233424
- K. Tatsumura, T. Shimura, E. Mishima, K. Kawamura, D. Yamasaki, H. Yamamoto, T. Watanabe, M. Umeno, I. Ohdomari, Phys. Rev. 872, 045205 (2005)
- (2005) Phys. Rev. , vol.872 , pp. 045205
- Tatsumura, K.¹ Shimura, T.² Mishima, E.³ Kawamura, K.⁴ Yamasaki, D.⁵ Yamamoto, H.⁶ Watanabe, T.⁷ Umeno, M.⁸ Ohdomari, I.⁹

43
- 0000596631
- M. Marsi, R. Belkhou, C. Grupp, G. Panccione.A. Taleb-Ibrahimi, L. Nahon, D. Garzella. D. Naturelli, E. Renault, R. Roux, M.E. Couprie, M. Billardon, Phys. Rev. B 61, R5070 (2000)
- (2000) Phys. Rev. B , vol.61
- Marsi, M.¹ Belkhou, R.² Grupp, C.³ Panccione, G.⁴ Taleb-Ibrahimi, A.⁵ Nahon, L.⁶ Garzella, D.⁷ Naturelli, D.⁸ Renault, E.⁹ Roux, R.¹⁰ Couprie, M.E.¹¹ Billardon, M.¹²

44
- 0037185138
- .T.-Y. Zhang, I.W. Boyd, Appl. Surf. Sci. 186, 64 (2002)
- (2002) Appl. Surf. Sci. , vol.186 , pp. 64
- Zhang, T.-Y.¹ Boyd, I.W.²

45
- 0037171193
- A. Bongiomo, A. Pasquarello, Phys. Rev. Lett. 88, 125901 (2002)
- (2002) Phys. Rev. Lett. , vol.88 , pp. 125901
- Bongiomo, A.¹ Pasquarello, A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.