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Volumn 88, Issue 12, 2002, Pages 1259011-1259014
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Oxygen diffusion through the disordered oxide network during silicon oxidation
a a
a
EPFL
(Switzerland)
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMS;
COMPUTER SIMULATION;
DIFFUSION;
MOLECULAR DYNAMICS;
MONTE CARLO METHODS;
OXIDATION;
POTENTIAL ENERGY;
SILICA;
SILICON;
DISORDERED OXIDE NETWORK;
OXYGEN;
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EID: 0037171193
PISSN: 00319007
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (99)
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References (32)
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