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Volumn 88, Issue 12, 2002, Pages 1259011-1259014

Oxygen diffusion through the disordered oxide network during silicon oxidation

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; COMPUTER SIMULATION; DIFFUSION; MOLECULAR DYNAMICS; MONTE CARLO METHODS; OXIDATION; POTENTIAL ENERGY; SILICA; SILICON;

EID: 0037171193     PISSN: 00319007     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (99)

References (32)
  • 21
    • 0008915338 scopus 로고    scopus 로고
    • note


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.