Design and analysis of self-repairable MEMS accelerometer

Proceedings - IEEE International Symposium on Defect and Fault Tolerance in VLSI Systems

Volumn , Issue , 2005, Pages 21-29

  Xiong, Xingguo ^a   Wu, Yu Liang ^b   Jone, Wen Ben ^a  

^a University of Cincinnati   (United States)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Built in self repair (BISR); MEMS; Micro accelerometer; Redundancy repair; Yield analysis

Indexed keywords

ACCELEROMETERS; COMPUTER SIMULATION; CONTROL SYSTEMS; NETWORKS (CIRCUITS); REDUNDANCY; RELIABILITY; SENSITIVITY ANALYSIS;

BUILT-IN-SELF-REPAIR (BISR); MICRO-ACCELEROMETER; REDUNDANCY REPAIR; YIELD ANALYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 28444442252     PISSN: 15505774     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. URL: http://public.itrs.net.
2. J. Ramirez-Angulo, and R. L. Geiger, "New Laser-trimmed Him Resistor Structures for Very High Stability Requirements", IEEE Transactions on Electron Devices. Vol. 35, Issue 4, pp. 516-518, Apr. 1988.
3. K. Tanaka, Y. Mochida, M. Sugimoto, K. Moriya, T. Hasegawa, K. Atsuchi, and K. Ohwada, "A Micromachined Vibrating Gyroscope", Sensors and Actuators A: Physical, Vol. 50, pp. 111-115,1995.
4. S. B. Koppaka and L. M. Phinney, "Release Processing Effects on Laser Repair Stiction-Failed Microcann'levers", Journal of Microelearomechanical Systems, Vol. 14, No. 2, Apr. 2005, pp. 410-418.
5. S. K. Tewksbury, "Challenges Facing Practical DFT for MEMS", Proceedings of the 2001 IEEE International Symposium on Defect and Fault Tolerance in VLSI Systems (DFT'01), Oct. 24-26, 2001, pp. 11 -17.
6. X. Xiong, Y. Wu. and W. Jone, "A Dual-mode Built-in Self-test Technique for Capacitive MEMS Devices", Proceedings of 22nd IEEE VLSI Test Symposiim'04, pp. 148-153, 25-29 May, 2004.
7. W. Kuehnel, and S. Sherman, "A Surface Micromachined Silicon Accelerometer with On-chip Detection Circuitry," Sensors and Actuators A: Physical, Vol. 45, pp. 7-16, 1994.
8. N. Deb, and R. D. Blanton, "Analysis of Failure Sources in Surface-rracromachined MEMS", Proc. of International Test Conference, pp. 739-749, Oct. 2000.
9. B. Li, D. Lu, and W. Wang, "Open-loop Operating Mode of Micromachined Capacitive Accelerometer", Sensors and Actuators A: Physical, Vol. 79, pp. 219-223, 2000.
10. M. Bao, H. Yang, H. Yin, and S. Shen, "Effects of Electrostatic Forces Generated by the Driving Signal on Capacitive Sensing Devices", Sensors and Actuators A: Physical, Vol. 84, pp. 213-219, 2000.
11. J. Hirase, "Yield Increase of VLSI after Redundancy-repairing," Proc. of 10th Asian Test Symposium, pp.353-358, Nov. 2001.
12. URL: http://www.ansys.com.