A dual-mode built-in self-test technique for capacitive MEMS devices

Proceedings of the IEEE VLSI Test Symposium

Volumn , Issue , 2004, Pages 148-153

  Xiong, Xingguo ^a   Wu, Yu Liang ^b   Jone, Wen Ben ^a  

^a UNIVERSITY OF CINCINNATI   (United States)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ACTUATORS; BUILT-IN SELF TEST; CAPACITANCE; COMPUTER SIMULATION; ELECTRIC POTENTIAL; MICROSTRUCTURE; SENSORS; SWITCHES;

CAPACITANCE STRUCTURE; ELECTROSTATIC ACTIVATION; ELECTROSTATIC ACTUATION; MODULATION VOLTAGE;

MICROELECTROMECHANICAL DEVICES;

EID: 3142711733     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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