Open-loop operating mode of micromachined capacitive accelerometer

Sensors and Actuators, A: Physical

Volumn 79, Issue 3, 2000, Pages 219-223

  Li, Baoqing ^a   Lu, Deren ^a   Wang, Weiyuan ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; ELECTROSTATICS; FEEDBACK; MICROMACHINING; SENSITIVITY ANALYSIS;

CAPACITIVE ACCELEROMETERS; OPEN LOOP OPERATING MODE;

ACCELEROMETERS;

EID: 0033903061     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00286-1     Document Type: Article

References (11)

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