Modeling of heterogeneous precipitation of iron in silicon

Applied Physics Letters

Volumn 87, Issue 15, 2005, Pages 1-3

  Haarahiltunen, A ^a   Vainola H ^a   Anttila, O ^b   Saarnilehto, E ^a   Yli Koski, M ^a   Storgrds J ^a   Sinkkonen, J ^a  

^a AALTO UNIVERSITY   (Finland)

^b Okmetic Oyj   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

PRECIPITATION (CHEMICAL); SILICON; THERMAL EFFECTS;

THERMAL PROCESSING;

IRON;

EID: 28344449653     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2099531     Document Type: Article

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