Detection of iron contamination in internally gettered p-type silicon wafers by lifetime measurements

Proceedings - Electrochemical Society

Volumn 5, Issue , 2004, Pages 135-145

  Haarahiltunen, A ^a   Vainola H ^a   Yli Koski, M ^a   Saarnilehto, E ^a   Sinkkonen, J ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; APPROXIMATION THEORY; CONTAMINATION; ELECTRIC POTENTIAL; NUCLEATION; PRECIPITATION (CHEMICAL); SILICON WAFERS;

GETTERING TREATMENTS; INTERNAL GATTERING (IG); PHOTOCONDUCTIVE DECAY (Μ-PCD); SURFACE PHOTO VOLTAGE (SPV);

IRON;

EID: 17144426089     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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