Enhancement of internal gettering efficiency of iron by low temperature nucleation

Proceedings - Electrochemical Society

Volumn 5, Issue , 2004, Pages 160-164

  Vainola H ^a   Haarahiltunen, A ^a   Saarnilehto, E ^a   Yli Koski, M ^a   Sinkkonen, J ^a   Anttila, O ^b  

^a AALTO UNIVERSITY   (Finland)

^b Okmetic Oyj   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

COOLING; GETTERS; IMPURITIES; MATHEMATICAL MODELS; NUCLEATION; OPTIMIZATION; OXYGEN; PRECIPITATION (CHEMICAL); SILICON WAFERS; SUPERSATURATION; TRANSITION METALS;

DIFFUSION-LIMITED PRECIPITATION; GETTERING PROCESSES; INTERNAL GETTERIFNG (IG); STRUCTURAL DEFECTS;

IRON;

EID: 17144385859     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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