Low temperature fabrication of vanadium oxide films for uncooled bolometric detectors

Infrared Physics and Technology

Volumn 47, Issue 3, 2006, Pages 273-277

  Wang, Hongchen ^a,b   Yi, Xinjian ^a   Chen, Sihai ^a,b  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Ion beam sputtering; Uncooled detectors; Vanadium oxides film; VO2(B) film

Indexed keywords

ANNEALING; ION BEAMS; PHASE TRANSITIONS; THERMAL EFFECTS; X RAY DIFFRACTION;

ION BEAM SPUTTERING; UNCOOLED DETECTORS; VANADIUM OXIDE FILMS; VO2(B) FILMS;

VANADIUM COMPOUNDS;

EID: 28044471597     PISSN: 13504495     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.infrared.2005.04.001     Document Type: Article

References (13)

1. H. Jerominek, F. Picard, and D. Vincent Vanadium oxide films for optical switching and detection Optical Engineering 32 9 1993 2092 2099
2. S.K. Narayandass, V. Gopal, and R.T. Rajendar Kumar Study of a pulsed laser deposited vanadium oxide based microbolometer array Smart Materials and Structures 12 2 2003 188 192
3. J.Z. Cui, D.A. Da, and W.S. Jiang Structure characterization of vanadium oxide thin films prepared by magnetron sputtering methods Applied Surface Science 133 3 1998 225 229
4. 2 thin films Thin Solid Films 286 1-2 1996 219 222
5. T.D. Manning, I.P. Parkin, and M.E. Pemble Intelligent window coatings: atmospheric pressure chemical vapor deposition of tungsten-doped vanadium dioxide Chemistry of Materials 16 4 2004 744 749
6. D. Barreca, L.E. Depero, and E. Franzato Vanadyl precursors used to modify the properties of vanadium oxide thin films obtained by chemical vapor deposition Journal of the Electrochemical Society 146 2 1999 551 558
7. Y. Dachuan, X. Niankan, and Zh. Jingyu High quality vanadium dioxide films prepared by an inorganic sol-gel method Materials Research Bulletin 31 3 1996 335 340
8. C.H. Chen, X.J. Yi, and X.R. Zhao Preparation and properties of vanadium dioxide thin films for uncooled microbolometer Infrared and Millimeter Waves, 2000. Conference Digest 9 2000 145 146
9. E.E. Chain The influence of deposition temperature on the structure and optical properties of vanadium oxide films Journal of Vacuum Science and Technology A4 3 1986 432 435
10. E.E. Chain Effects of oxygen in ion-beam sputter deposition of vanadium oxide Journal of Vacuum Science and Technology A5 4 1987 1836 1839
11. B.E. Core, R.E. Higashi, and J.A. Ridley Integrated vacuum packaging for low-cost light-weight uncooled microbolometer arrays SPIE 4369 2001 235 239
12. X.J. Wang, H.D. Li, and Y.J. Fei XRD and Raman study of vanadium oxide thin films deposited on fused silica substrates by RF magnetron sputtering Applied Surface Science 177 2001 8 14
13. 2 thin films prepared by a wet coating method using polyvanadate-based sols containing W and Mo or W and Ti Japanese Journal of Applied Physics, Part 1 40 3 2001 1391 1395