Rigorous coupled-wave analysis calculus of submicrometer interference pattern and resolving edge position versus signal-to-noise ratio

Optical Engineering

Volumn 41, Issue 8, 2002, Pages 1886-1892

  Tavrov, Alexander ^a   Totzeck, Michael ^a   Kerwien, Norbert ^a   Tiziani, Hans J ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Edges; Interference; Microscopy; Signal to noise ratio

Indexed keywords

EDGE DETECTION; IMAGE PROCESSING; LIGHT POLARIZATION; SIGNAL TO NOISE RATIO;

INTERFERENCE MICROSCOPES;

LIGHT INTERFERENCE;

EID: 0036672155     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1490589     Document Type: Article

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