High-stability white-light interferometry with reference signal for real-time correction of scanning errors

Optical Engineering

Volumn 42, Issue 1, 2003, Pages 54-59

  Olszak, Artur ^a   Schmit, Joanna ^a  

^a VEECO INSTRUMENTS INC   (United States)

Author keywords

Interferometry; Optical testing; Scanning

Indexed keywords

ERROR CORRECTION; INTERFEROMETRY; MOTION ESTIMATION; OBJECT RECOGNITION; OPTICAL DATA PROCESSING; OPTICAL TESTING; SCANNING;

OBJECT TOPOGRAPHY MEASUREMENT; OPTICAL PATH DIFFERENCE; REAL TIME CORRECTION; SCANNING ERRORS; WHITE LIGHT INTERFEROMETRY;

LIGHT MEASUREMENT;

EID: 0037248235     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1523942     Document Type: Article

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