Effects of defocus and algorithm on optical step height calibration

Precision Engineering

Volumn 23, Issue 3, 1999, Pages 135-143

  Doi, Takuma ^a   Vorburger, Theodore ^a   Sullivan, Paul ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CALIBRATION; ESTIMATION; FOCUSING; INTERFEROMETRY; MEASUREMENT ERRORS; MICROSCOPES; SURFACE MEASUREMENT; SURFACE TOPOGRAPHY;

INTERFEROMETRIC MICROSCOPY; NUMERICAL APERTURE CORRECTION FACTOR; STEP HEIGHT CALIBRATION;

OPTICAL MICROSCOPY;

EID: 0033154065     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(99)00002-1     Document Type: Article

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