Functional nanostructured titanium nitride films obtained by sputtering magnetron

Thin Solid Films

Volumn 495, Issue 1-2, 2006, Pages 149-153

  Sanchez O ^a   Hernandez Velez M ^a,b   Navas, D ^a   Auger, M A ^c   Baldonedo, J L ^d   Sanz, R ^a   Pirota, K R ^a   Vazquez M ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^b UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

^c DEPARTMENT OF PHYSICAL METALLURGY   (Spain)

^d UNIVERSIDAD COMPLUTENSE DE MADRID   (Spain)

Author keywords

AAM; Nanostructures; Nanotubes; Sputtering; TiN

Indexed keywords

ANODIC OXIDATION; ENERGY DISPERSIVE SPECTROSCOPY; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; NANOTUBES; OPTOELECTRONIC DEVICES; SCANNING ELECTRON MICROSCOPY; TITANIUM NITRIDE; X RAY DIFFRACTION;

ANODIC ALUMINA MEMBRANES (AAM); HOLLOW STRUCTURES; NANOHILLS;

THIN FILMS;

EID: 28044453340     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.203     Document Type: Conference Paper

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