Investigation of microfabrication of diamond-like film via focused ion beam milling

Review of Scientific Instruments

Volumn 74, Issue 8, 2003, Pages 3689-3692

  Fu, Yongqi ^a   Bryan, Ngoi Kok Ann ^b   Xie, Dongzhu ^b  

^a SINGAPORE MIT ALLIANCE   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTIVE OPTICS; ION BEAMS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE; X RAY PHOTOELECTRON SPECTROSCOPY;

ION BEAM MILLING;

DIAMOND LIKE CARBON FILMS;

EID: 0041375591     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1593812     Document Type: Article

References (9)

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