Analysis and quantification of device spectral signatures observed using a spectroscopic photon emission microscope

Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA

Volumn , Issue , 1997, Pages 33-38

  Tao, J M ^a   Chim, W K ^a   Chan, D S H ^a   Phang, J C H ^a   Liu, Y Y ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSCOPIC EXAMINATION; PHOTOEMISSION; PHOTONS; SPECTRUM ANALYSIS;

SPECTROSCOPIC PHOTON EMISSION MICROSCOPES (SPEMS);

SEMICONDUCTOR DEVICE TESTING;

EID: 0031342492     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)