Balance-approach for load-displacement measurement of microstructures

Mechatronics

Volumn 8, Issue 5, 1998, Pages 549-559

  Xiong, Xingguo ^a   Zou, Qiang ^a   Lu, Deren ^a   Wang, Weiyuan ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Capacitive accelerometer; Micromechanism; The Young's modulus

Indexed keywords

DEFLECTION (STRUCTURES); ELASTIC MODULI; FORCE MEASUREMENT; MICROELECTROMECHANICAL DEVICES;

BALANCE METHOD; CAPACITIVE ACCELEROMETERS; DISPLACEMENT MEASUREMENT; SILICON CANTILEVERS;

ACCELEROMETERS;

EID: 0032142085     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0957-4158(98)00018-X     Document Type: Article

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