Micro force transfer standards

VDI Berichte

Volumn , Issue 1685, 2002, Pages 83-88

  Doring, L ^a   Brand, U ^a   Fruhauf J ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICRO FORCE CALIBRATION; MICRO FORCE MEASURING DEVICES (MFMD); MICRO FORCE SENSORS; PIEZORESISTIVITY;

ATOMIC FORCE MICROSCOPY; FORCE MEASUREMENT; PIEZOELECTRICITY; POLYNOMIALS; SCANNING; SENSORS; STIFFNESS; STRAIN; STRESS ANALYSIS; THERMAL EFFECTS; VIBRATIONS (MECHANICAL);

MATERIALS SCIENCE;

EID: 4444345667     PISSN: 00835560     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (7)

1. J. Fruehauf, H. Trumpold: Silicon Standards for Assessment and Calibration of Stylus Probes. 52nd CIRP General Assembly, San Sebastian, Spain, 18-24 August 2002, S/2 accepted for publication in CIRP Annals 2002
2. L. Doering, U. Brand: Proc. Nanoscale Conf. 21. November 2001, Bergisch-Gladbach, Sicantilevers with integrated piezo resistive elements as micro force transfer standards, PTB-F-44, Physikalisch-Technische Bundesanstalt Braunschweig und Berlin, ISBN 3-89701-840-3, 185-192
3. PIFOC, type P-721.20, Physik Instrumente (PI) GmbH & Co, 76337 Waldbronn (Germany)
4. AFM cantilever, type Pi-NC-8, NANOSENSORS GmbH & Co. KG, IMO Building, Im Amtmann 6, D-35578 Wetzlar-Blankenfeld (Germany)
5. W. Hoffmann, S. Loheide, T. Kleine-Besten, U. Brand, A. Schlachetzki: Method of characterising micro mechanical beams and its calibration for the application in micro force measurement systems. MicroTec 2000, Hannover, 819-823
6. Dektak 3, Veeco Instruments GmbH, Janderstrasse 9, D 68199 Mannheim
7. U. Brand, T. Kleine-Besten, H. Schwenke: Development of a special CMM for dimensional metrology on microsystem components, ASPE 15th Annual Meeting in Scottsdale (Arizona), 22-27 October 2000, 542-546