A tunable microlens scanner with large-vertical-displacement actuation

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 92-95

  Jain, Ankur ^a   Xie, Huikai ^a  

^a J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CAVITY RESONATORS; ELECTRIC POTENTIAL; MICROACTUATORS; PHOTORESISTS; SCANNING; TUNING;

ACTUATION VOLTAGES; FOCAL LENGTH; LARGE-VERTICAL-DISPLACEMENT (LVD); REFLOW TECHNIQUE;

MICROLENSES;

EID: 26844559805     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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