Total scatter losses of optical components in the DUV/VUV spectral range

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3902, Issue , 2000, Pages 118-127

  Kadkhoda, P ^a   Muller, A ^a   Ristau, D ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGING SYSTEMS; LIGHT SCATTERING; ULTRAVIOLET RADIATION; VACUUM;

COBLENTZ HEMISPHERE; DEEP ULTRAVIOLET/VACUUM ULTRAVIOLET (DUV/VUV) SPECTRAL RANGE; TOTAL SCATTERING (TS);

OPTICAL DEVICES;

EID: 0033871859     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.379308     Document Type: Conference Paper

References (13)