Characterization of CaF2 substrates for VUV fluoride coatings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5250, Issue , 2004, Pages 119-126

  Hultåker, Annette ^a   Gliech, Stefan ^a   Gessner, Henning ^a   Duparré, Angela ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

157 nm; Atomic Force Microscopy; CaF2; Light scattering

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALCIUM COMPOUNDS; DEPOSITION; INTERFACES (MATERIALS); LIGHT REFLECTION; LIGHT SCATTERING; SURFACE ROUGHNESS; TRANSPARENCY; ULTRAVIOLET RADIATION;

157 NM; CAF2; SURFACE QUALITY;

OPTICAL COATINGS;

EID: 1942534649     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.512691     Document Type: Conference Paper

References (11)

1. A. Duparré, "Light scattering of thin dielectric films", in Thin Films for Optical Coatings, R.E. Hummel and K.H. Guenther, eds., vol. 1 of Handbook of Optical Properties Series, (CRC, Boca Raton, FL) 1995.
2. J. Ferré-Borrull, A. Duparré, and E. Quesnel, "Roughness and light scattering of ion-beam-sputtered fluoride coatings for 193 nm", Appl. Opt. 39, 5854-5864, 2000.
3. J. Ferré-Borrull, A. Duparré, and E. Quesnel, "Procedure to characterize microroughness of optical thin films: application to ion-beam-sputtered vacuum-ultraviolet coatings", Appl. Opt. 40, 2190-2199, 2001.
4. P. Kadkhoda, A. Müller, D. Ristau, A. Duparré, S. Gliech, H. Lauth, U. Schuhmann, N. Reng, M. Tilsch, R. Schuhmann, C. Amra, C. Deumie, C. Jolie, H. Kessler, T. Lindström, C- G. Ribbing, and J.M. Bennett, "International round-robin experiment to test the International Organization for Standardization total-scattering draft standard", Appl. Opt. 39, 3321-3332, 2000.
5. S. Gliech, J. Steinert, and A. Duparré, "Light scattering measurements of optical thin-film components at 157 and 193 nm", Appl. Opt., 41, 3224-3235, 2002.
6. S. Gliech, H. Geßner, and A. Duparré, "System for angle resolved and total light scattering, transmittance and reflectance measurement at 157 nm and 193 nm", Proc SPIE LBOC 7 / Boulder Damage Symposium, 2002, vol. 4932, 452-457, (SPIE) 2003.
7. A. Duparré, J. Ferre-Borrull, S. Gliech, G. Notni, J. Steinert, and J.M. Bennett, "Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components", Appl. Opt., 41, 154-171, 2002.
8. 2 (111) surface: from cleavage via island to evaporation topographies", Surf. Sci., 448, 187-200, 2000.
9. 2", Appl. Surf. Sci., 183, 264-269, 2001.
10. S. Jakobs, A. Duparré, and H. Truckenbrodt, "Interfacial roughness and related scatter in ultraviolet optical coatings: a systematic experimental approach", Appl. Opt., 37, 1180-1193, 1998.
11. C.K. Carnigila, "Scalar scattering theory for multilayer optical coatings", Opt. Eng. 18, 104-115, 1979.