Angle resolved scattering measurements of polished surfaces and optical coatings at 157 nm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5040 II, Issue , 2003, Pages 742-752

  Bloomstein, T M ^a   Hardy, D E ^a   Gomez, L ^a   Rothschild, M ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; LIGHT SCATTERING; NANOTECHNOLOGY; OPTICAL COATINGS; OPTICAL DESIGN; OPTICAL VARIABLES MEASUREMENT; POLISHING; SURFACE ROUGHNESS;

ANGLE RESOLVED SCATTERING MEASUREMENT; ANTIREFLECTIVE COATING; THIN FILM DEPOSITION;

PHOTOLITHOGRAPHY;

EID: 0141610614     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485469     Document Type: Conference Paper

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