Light-scattering measurements of optical thin-film components at 157 and 193 nm

Applied Optics

Volumn 41, Issue 16, 2002, Pages 3224-3235

  Gliech, Stefan ^a   Steinert, Jürg ^a   Duparrè, Angela ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; DEUTERIUM; EXCIMER LASERS; INTERFACES (MATERIALS); LIGHT SCATTERING; MULTILAYERS; OPTICAL COATINGS; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS;

INTERFACE ROUGHNESS;

OPTICAL FILMS;

EID: 0036603382     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.003224     Document Type: Article

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