The effect of nitrogen gas flow rate on the properties of TiN-coated High-speed Steel (HSS) using cathodic arc evaporation Physical Vapor Deposition (PVD) technique

Surface Review and Letters

Volumn 12, Issue 4, 2005, Pages 631-643

  Ali, Mubarak ^a   Hamzah, Esah Binti ^a   Mohd Toff, Mohd Radzi H J ^b   Hashim, Abdul Hakim Bin ^b  

^a UNIVERSITI TEKNOLOGI MALAYSIA   (Malaysia)

^b Advanced Materials Research Centre AMREC   (Malaysia)

Author keywords

Cathodic arc; Deposition; Hardness; High speed steel (HSS); Microstructure; Physical vapor deposition (PVD); Surface roughness; TiN

Indexed keywords

CATHODES; MICROSTRUCTURE; PHYSICAL VAPOR DEPOSITION; TITANIUM NITRIDE;

CATHODE MATERIALS; CATHODIC ARC EVAPORATION (CAE); NITROGEN GAS FLOW;

NITROGEN;

EID: 27744526845     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0218625X05007542     Document Type: Article

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