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Volumn 152, Issue 10, 2005, Pages

The effect of film thickness on the C40 TiSi2 to C54 TiSi 2 transition temperature

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; COMPRESSIVE STRENGTH; ELECTRIC CONDUCTIVITY; EXCIMER LASERS; HIGH TEMPERATURE EFFECTS; NEODYMIUM LASERS; SUPERCONDUCTING TRANSITION TEMPERATURE; THIN FILMS; TITANIUM COMPOUNDS; YTTRIUM COMPOUNDS;

EID: 27644500030     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2007107     Document Type: Article
Times cited : (4)

References (34)
  • 24
    • 0002673393 scopus 로고
    • C. Dell'Oca and W. M. Bullis, Editors, PV 82-7, The Electrochemical Society, Pennington, NJ
    • F. M. d'Heurle, in VLSI Science and Technology,C. Dell'Oca and W. M. Bullis, Editors, p. 194, PV 82-7, The Electrochemical Society, Pennington, NJ (1982).
    • (1982) VLSI Science and Technology , pp. 194
    • D'Heurle, F.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.