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Journal of the Electrochemical Society

Volumn 148, Issue 12, 2001, Pages

Enhancement Effect of C40 TiSi2 on the C54 Phase Formation

(4) Chen, S Y a Shen, Z X a See, A K b Chan, L H b

a NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

b CHARTERED SEMICONDUCTOR MANUFACTURING LTD (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000009850 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1417978 Document Type: Article

Times cited : (8)

References (16)

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