A MEMS multi-sensor chip for gas flow sensing

Sensors and Actuators, A: Physical

Volumn 121, Issue 1, 2005, Pages 253-261

  Xu, Yong ^a   Chiu, Chen Wei ^b   Jiang, Fukang ^b   Lin, Qiao ^c   Tai, Yu Chong ^d  

^a Wayne State University   (United States)

^b Umachines Inc   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

^d California Institute of Technology   (United States)

Author keywords

Flow sensor; Microchannel flow; Pressure sensor; Shear stress sensor; Temperature sensor

Indexed keywords

CIRCUIT THEORY; FLOW MEASUREMENT; MICROELECTROMECHANICAL DEVICES; POLYSILICON; PRESSURE DISTRIBUTION; SENSITIVITY ANALYSIS; SHEAR STRESS; STRESS ANALYSIS; THERMAL EFFECTS; THIN FILMS; VELOCITY;

FLOW SENSORS; MICROCHANNEL FLOW; PRESSURE SENSORS; SHEAR-STRESS SENSORS; TEMPERATURE SENSOR;

SENSORS;

EID: 21744453386     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.12.022     Document Type: Article

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