Dependence of the resonant frequency of micromachined gold microbeams on polarisation voltage

Microelectronics Journal

Volumn 29, Issue 8, 1998, Pages 543-546

  Attia, P ^a   Hesto, P ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

Gold cantilever beam; Natural frequency; Resonant frequency

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; FABRICATION; FREQUENCY RESPONSE; MICROELECTRONIC PROCESSING; NATURAL FREQUENCIES; POLARIZATION; RESONATORS;

GOLD CANTILEVER BEAM; MICROBEAMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032138580     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0026-2692(98)00006-8     Document Type: Article

References (7)

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