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Applied Physics A: Materials Science and Processing

Volumn 81, Issue 8, 2005, Pages 1591-1593

Synthesis of crystalline Ge nanoclusters in PE-CVD-deposited SiO 2 films

(7) Pedersen, T P Leervad a Jensen, J Skov a Chevallier, J a Hansen, O b Jensen, J M b Nielsen, B Bech a Larsen, A Nylandsted a

a AARHUS UNIVERSITY (Denmark)

b TECHNICAL UNIVERSITY OF DENMARK (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLINE MATERIALS; GERMANIUM; LIGHT EMISSION; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; SYNTHESIS (CHEMICAL); THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

ANNEALING PARAMETERS; NANOCLUSTERS; SEMICONDUCTOR TECHNOLOGY;

NANOSTRUCTURED MATERIALS;

EID: 27244458625 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-005-3331-0 Document Type: Article

Times cited : (3)

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