A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 32-35

  Cho, Il Joo ^a   Song, Taeksang ^a   Baek, Sang Hyun ^a   Yoon, Euisik ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC FORCE; LOW VOLTAGE OPERATION; POWER CONSUMPTION; TORSION BARS;

ACTUATORS; ELECTRIC POTENTIAL; ELECTRIC SWITCHES; ELECTROSTATICS; TORSIONAL STRESS;

MICROELECTROMECHANICAL DEVICES;

EID: 26844485584     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2005.1453860     Document Type: Conference Paper

References (6)

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3. Sergio P. Pacheco, Dimitrios Peroulis and Linda P. B. Katehi, "MEMS single-pole double-throw X and K-band switching circuits", IEEE MTT-S International Microwave Symposium Proceedings, pp. 321-324, 2001.
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6. Il-Joo Cho, Kwang-Seok Yun, Hyung-Kew Lee, Jun-Bo Yoon and Euisik Yoon, "A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plate and torsion bars", IEEE MEMS 2002 proceedings, pp. 540-543, 2002.