Pure and mixed phase Bi2O3 thin films obtained by metal organic chemical vapor deposition

Chemical Vapor Deposition

Volumn 2, Issue 6, 1996, Pages 238-242

  Bandoli, Giuliano ^a   Barreca, Davide ^a   Brecacin, Enrico ^a   Rizzi, Gian A ^a   Tondello, Eugenio ^a  

^a UNIVERSITY OF PADOVA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BISMUTH COMPOUNDS; ELECTRIC PROPERTIES; FILM GROWTH; INFRARED SPECTROSCOPY; MORPHOLOGY; PHASE COMPOSITION; SUBSTRATES; SYNTHESIS (CHEMICAL); THICKNESS MEASUREMENT; THIN FILMS; X RAY DIFFRACTION;

ALUMINUM OXIDE; AMMOXIDATION; BISMUTH OXIDE; SURFACE REACTIVITY; THERMAL EVAPORATION;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 0030283829     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/cvde.19960020605     Document Type: Article

References (16)