An elastic thin-film microlens array with a pneumatic actuator

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 321-324

  Hoshino, K ^a   Shimoyama, I ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ARRAYS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; PNEUMATIC CONTROL EQUIPMENT; RAY TRACING; REFRACTIVE INDEX; THIN FILM DEVICES;

MICROLENS ARRAY; PNEUMATIC ACTUATOR;

MICROLENSES;

EID: 0035007872     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)