An electrothermally-actuated, dual-mode micromirror for large bi-directional scanning

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2004, Pages 47-50

  Jain, Ankur ^a   Todd, Shane ^a   Xie, Huikai ^a  

^a University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTRON RESONANCE; EQUIVALENT CIRCUITS; HEAT RESISTANCE; MIRRORS; OPTICAL DEVICES; QUANTUM THEORY; SCANNING; SINGLE CRYSTALS; THIN FILMS; CIRCUIT SIMULATION; PISTONS;

CIRCUIT MODEL; MICROMIRROR; OPTICAL ANGLES; SINGLE-CRYSTAL-SILICON (SCS);

MICROELECTROMECHANICAL DEVICES; SILICON WAFERS;

BI-DIRECTIONAL; BI-DIRECTIONAL SCANNING; CIRCUIT MODELING; DC VOLTAGE; DUAL MODES; MICRO MIRROR; OPTICAL-; PISTON MOTION; SILICON-BASED; SINGLE CRYSTAL SILICON;

EID: 21644489119     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. H. Xie, Y. Pan, and G. K. Fedder, "Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror," Sensors and Actuators A, 103, pp. 237-241 (2003).
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3. W. Piyawattanametha, P. R. Patterson, D. Hah, H. Toshiyoshi, and M. C. Wu, "A 2D scanner by surface and bulk micromachined angular vertical comb actuators," Optical MEMS 2003, Waikoloa, HI, August 18-21, 2003, pp. 93-94.
4. J. M. Zara and S. W. Smith, "Optical scanner using a MEMS actuator," Sensors and Actuators A, 102, pp. 176-184 (2002).
5. H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G.K. Fedder, "Post-CMOS processing for high-aspect-ratio integrated silicon microstructures," Journal of Microelectromechanical Systems, 11, pp. 93-101 (2002).
6. S. Todd, M.S. Thesis, University of Florida, 2004, unpublished.
7. J. Bühler, "Deformable micromirror arrays by CMOS technology," Ph. D. Thesis, The Swiss Federal Institute of Technology, 1997.
8. A. Jain, H. Qu, S. Todd, G. K. Fedder, and H. Xie, "Electrothermal SCS micromirror with large-vertical-displacement actuation," 2004 Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head, SC, June 2004, pp.228-231.