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Volumn 21, Issue 10, 1996, Pages 764-766
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Micromachined scanning confocal optical microscope
a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ETCHING;
FUSED SILICA;
MICROMACHINING;
MIRRORS;
OPTICAL FIBERS;
OPTICAL INSTRUMENT LENSES;
OPTICAL MICROSCOPY;
SCANNING;
SILICON;
ELECTROSTATIC TORSIONAL SCANNING MIRRORS;
OFF AXIS PHASE ZONE PLATE LENS;
SCANNING CONFOCAL OPTICAL MICROSCOPES;
SINGLE MODE FIBER;
MICROSCOPES;
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EID: 0030145990
PISSN: 01469592
EISSN: None
Source Type: Journal
DOI: 10.1364/OL.21.000764 Document Type: Article |
Times cited : (213)
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References (10)
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