The increasing importance of the use of ozone in the microelectronics industry

Ozone: Science and Engineering

Volumn 24, Issue 5, 2002, Pages 379-390

  De Smedt, F ^a   De Gendt, S ^b   Claes, M ^b   Heyns, M M ^b   Vankerckhoven, H ^a   Vinckier, C ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

Author keywords

Microelectronics Industry; Ozone; Ozone Decomposition; Semiconductor Applications; Ultrapure Water

Indexed keywords

CONTAMINATION; DECOMPOSITION; MICROELECTRONICS; OXIDATION; PH EFFECTS; SEMICONDUCTOR DEVICE MANUFACTURE; SOLUBILITY;

MICROELECTRONICS INDUSTRY; OZONE DECOMPOSITION; SEMICONDUCTOR APPLICATIONS; ULTRAPURE WATER;

OZONE;

EID: 26644436940     PISSN: 01919512     EISSN: None     Source Type: Journal    
DOI: 10.1080/01919510208901628     Document Type: Article

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