The Application of Ozone in Semiconductor Cleaning Processes: The Solubility Issue

Journal of the Electrochemical Society

Volumn 148, Issue 9, 2001, Pages

  De Smedt, F ^a   De Gendt, S ^b   Heyns, M M ^b   Vinckier, C ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038548746     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1385820     Document Type: Article

References (39)

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