Micromachined infrared sensors with device-level encapsulation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5783, Issue PART I, 2005, Pages 460-469

  Dave, Aasutosh ^a   Çelik Butler, Zeynep ^a   Butler, Donald P ^a  

^a University of Texas at Arlington   (United States)

Author keywords

Device level encapsulation; Smart skin; Uncooled IR detection

Indexed keywords

BOLOMETERS; ELECTRONICS PACKAGING; ENCAPSULATION; LIGHT TRANSMISSION; MICROELECTROMECHANICAL DEVICES; OPTICAL SENSORS; ROBOTICS; VACUUM;

DEVICE-LEVEL ENCAPSULATION; MICROBOLOMETERS; SMART SKIN; UNCOOLED IR DETECTION;

INFRARED DETECTORS;

EID: 26444598465     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.603795     Document Type: Conference Paper

References (18)

1. B. Lee, S. Seok, and K Chun, "A Study on Wafer Level Vacuum Packaging For MEMS Devices", Journal of Micromechanics and Microengineering, 13, pp 663-669, 2003.
2. T. S. McLaren, S. Y. Kang, W. Zhang, T. Ju, and Y. Lee, "Thermosonic Bonding of an Optical Transceiver Based on an 8 × 8 Vertical Cavity Surface Emitting Laser Array", IEEE Transactions on Components, Packaging, and Manufacturing Technology-Part B, 20, pp 152-157, 1997.
3. C. H. Mastrangelo, J. Hsi-Jen Yeh, and R. S. Muller, "Electrical and Optical Characteristics of Vacuum-Sealed Polysilicon Microlamps", IEEE Transactions on Electron Devices, 39, pp 1363-1375, 1992.
4. A. Hochst, R. Scheuerer, H. Stahl, F. Fischer, L. Metzger, R. Reichenbach, F. Larmer, S. Kronmuller, S. Watcham, C. Rusus, A. Witvrouw, and R. Gunn, "Stable Thin Film Encapsulation of Acceleration Sensors Using Polycrystalliner Silicon as Sacrificial and Encapsulation Layer", Sensors and Actuators, 114, pp 355-361, 2004.
5. Y. Yamada, T. Maeno, I. Fujimoto, T. Morizono, and Y. Umetani, "Identification of Incipient Slip Phenomena Based on The Circuit Output Signals of PVDF Film Strips Embedded in Artificial Finger Ridges", Proceedings of SICE Annual Conference, pp 3272-3277, 2002.
6. Y. Xu, F. Jiang, S. Newbern, A. Huang, C.-M. Ho and Y.-C. Tai "Flexible Shear-Stress Sensor Skin and its Application to Unmanned Aerial Vehicles", Sensors and Actuators A: Physical, 105, pp 321-329, 2003.
7. T. Mori,T. Kudoh, K. Komatsu, and M. Kimura, "Vacuum-Encapsulated Thermistor Bolometer Type Miniature Infrared Sensor", Micro Electro Mechanical Systems MEMS '94 Proceedings, pp 257-262, 1994.
8. A. Mahmood, A. Dave, Z. Çelik-Butler, and D. P. Butler, "Wafer-Level Self-Packaged Infrared Microsensors", Proceedings of SPIE, 5406, pp 473-482, 2004
9. A. Mahmood, S. Dayeh, D. P. Butler, Z. Çelik-Butler, "Micromachined Infrared Sensor Arrays on Flexible Polyimide Substrates", IEEE Sensors 2003, pp 777-782, 2003.
10. P. C. Shan, Z. Celik-Butler, D. P. Butler and A. Jahanzeb, "Semiconducting YBaCuO Thin Films for Uncooled Infrared Bolometers", Journal of Applied Physics, 78, pp. 7334-7339, 1995.
11. M. Almasri, D. P. Butler, and Z. Celik-Butler, "Self Supporting Infrared Microbolometers With Low-Thermal Mass", Journal of Microelectromechanical Systems, 10, pp. 469-476, 2001.
12. 7-x Superconducting Thin-Film Bolometers: Artifacts Related to Joule Heating, Ambient Pressure, and Microstructures", IEEE Transactions on Applied Superconductivity, 8, pp. 69-78, 1998.
13. P. Eriksson, J. Y. Andersson, and G. Stemme, "Thermal Characterization of Surface-Micromachined Silicon Nitride Membranes for Thermal Infrared Detectors", Journal of Microelectromechanical Systems, 6, pp. 55-61, 1997.
14. R. P. Tye, "Thermal Conductivity", chapter 1 and 6, Academic Press, New York, 1969
15. S. V. Deshpande, E. Gulari, S. W. Brown, and S. C. Rand, "Optical Properties of Silicon Nitride Deposited by Hot Filament Chemical Vapor Deposition", Journal of Applied Physics, 77, pp. 6534-6541, 1995.
16. W. A. Pliskin, "Comparison of Properties of Dielectric Films Deposited by Various Methods", Journal of Vacuum Science and Technology, 14, pp. 1064-1081, 1977.
17. D. C Harris, "Durable 3-5μm Transmitting Infrared Window Materials" Infrared Physics and Technology, 39, pp. 185-201, 1998.
18. B. Bendow, "Fundamental Optical Phenomena in Infrared Window Materials", Annual Review of Materials Science, 7, pp. 23-53, 1977.