Calibration of a 300-mm-aperture phase-shifting Fizeau interferometer

Applied Optics

Volumn 39, Issue 28, 2000, Pages 5161-5171

  Oreb, Bozenko F ^a   Farrant, David I ^a   Walsh, Christopher J ^a   Forbes, Greg ^b   Fairman, Philip S ^a  

^a CSIRO   (Australia)

^b MACQUARIE UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; CALIBRATION; PHASE SHIFT;

FIZEAU INTERFEROMETERS;

INTERFEROMETERS;

EID: 0001001672     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.005161     Document Type: Article

References (29)

1. G. D. Dew, “The measurement of optical flatness,” J. Sci. Instrum. 43, 409-415 (1966).
2. G. Schultz and J. Schwider, “Precise measurement of planeness,” Appl. Opt. 6, 1077-1084 (1967).
3. G. Schultz and J. Schwider, “Interferometric testing of smooth surfaces,” in Progress in Optics E. Wolf, ed. (Elsevier, Amsterdam, 1976), Vol. 13, pp. 93-167.
4. R. E. Parks, “Removal of test optics errors,” in Advances in Optical Metrology I, N. Balasubramanian and J. C. Wyant, eds., Proc. SPIE 153, 56-63 (1978).
5. B. S. Fritz, “Absolute calibration of an optical flat,” Opt. Eng. 33, 379-383 (1984).
6. J. Grzanna and G. Schulz, “Absolute testing of flatness standards at square-grid points,” Opt. Commun. 77, 107-112 (1990).
7. C. J. Wyant, “Absolute optical testing: better accuracy than the reference,” Photonics Spectra (March 1991), pp. 97-101.
8. L. Shao, R. E. Parks, and C. Ai, “Absolute testing of flats using four data sets,” in Interferometry: Surface Characterization and Testing, K. Creath and J. E. Greivenkamp, eds., Proc. SPIE 1776, 94-97 (1992).
9. G. Schulz and J. Grzanna, “Absolute flatness testing by the rotation method with optimal measuring error compensation,” Appl. Opt. 31, 3767-3780 (1992).
10. C. Ai and J. C. Wyant, “Absolute testing of flats by using even and odd functions,” Appl. Opt. 32, 4698-4705 (1993).
11. K. E. Elssner, A. Vogel, J. Grzanna, and G. Schulz, “Establishing a flatness standard,” Appl. Opt. 33, 2437-2446 (1994).
12. C. J. Evans and R. N. Kestner, “Test optics error removal,” Appl. Opt. 35, 1015-1021 (1996).
13. M. Kuchel, “Two new principles for absolute interferometric testing of planes,” in International Workshop on Interferometry (IWI’96), Technical Digest AP96222S (Optical Society of Japan, Wako Saitama, Japan, 1996), pp. 73-76.
14. G. D. Dew, “Systems of minimum deflection supports for optical flats,” J. Sci. Instrum. 43, 809-811 (1966).
15. L. A. Selberg, “Interferometer accuracy and precision,” in Optical Fabrication and Testing, D. R. Campbell, C. W. Johnson, and M. Lorenzen, eds., Proc. SPIE 1400, 24-32 (1990).
16. R. Tronconi, V. Greco, and G. Molesini, “Outline of interfero-metric methods used at INO to assess the absolute planarity of flats,” Internal Rep. (Instituto Nazionale di Ottica, Firenze Italy, 1997).
17. P. S. Fairman, B. K. Ward, B. F. Oreb, D. I. Farrant, Y. Gilliand, C. H. Freund, A. J. Leistner, J. A. Seckold, and C. J. Walsh, “A 300 mm aperture phase-shifting Fizeau interferometer,” Opt. Eng. 38, 1371-1380 (1999).
18. C. J. Walsh, A. J. Leistner, J. Seckold, B. F. Oreb, and D. I. Farrant, “Fabrication and measurement ofoptics for the Laser Interferometer Gravitational Wave Observatory,” Appl. Opt. 38, 2870-2879 (1999).
19. P. Hariharan, “Interferometric measurements of small-scale surface irregularities: sources of errors,” Opt. Eng. 3G, 2330-2334 (1997).
20. K. Creath, “Phase measurement interferometry techniques,” in Progress in Optics, E. Wolf, ed. (Elsevier, Amsterdam, 1988), Vol. 26, pp. 349-393.
21. J. E. Grievenkamp and J. H. Brunning, “Phase shifting interferometry,” in Optical Shop Testing, 2nd ed., D. Malacara, ed. (Wiley, New York, 1992), Chap. 14.
22. P. Hariharan, “Phase-stepping interferometry with laser diodes: effects of laser wavelength modulation,” Appl. Opt. 28, 1749-1750 (1989).
23. K. G. Larkin and B. F. Oreb, “Design and assessment of symmetrical phase-shifting algorithms,” J. Opt. Soc. Am. A 9, 1740-1748 (1992).
24. K. Hibino, B. F. Oreb, D. I. Farrant, and K. G. Larkin, “Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts,” J. Opt. Soc. Am. A 14, 918-930 (1997).
25. T. Toshimi, “Mirror support: 3 or 9 points?” Sky Telesc. 88, 84-87 (1994).
26. M. Heath, Scientific Computing (McGraw-Hill, New York, 1997), p. 134.
27. P. Hariharan, “Optical flat surfaces: direct interferometric measurements of small-scale irregularities,” Opt. Eng. 35, 3265-3266 (1996).
28. P. Hariharan Veeco Vision software, 2650 East Elvira Road, Tucson, Arizona 85706.
29. B. F. Oreb, D. I. Farrant, C. J. Walsh, A. J. Leistner, F. J. Lesha, P. S. Fairman, and C. M. Sona, “Metrology of LIGO core optics,” in Interferometry’99: Techniques and Technologies, M. Kujawinska and M. Takeda, eds., Proc. SPIE 3744, 18-30 (1999).