Large-aperture high-accuracy phase-shifting digital flat interferometer

Optical Engineering

Volumn 35, Issue 7, 1996, Pages 1936-1942

  Chen, Jinbang ^a,b   Song, Dezhen ^a,b   Zhu, Rihong ^a,b   Wang, Qing ^a,b   Chen, Lei ^a,b   Chen, Daojiong ^a,b  

^a NANJING UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b Anhui Institute of Technology   (China)

Author keywords

Phase shifting interferometry; Plane standards

Indexed keywords

EID: 0001088341     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.600627     Document Type: Article

References (11)

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