Integration challenges for multi-gate devices

2005 International Conference on Integrated Circuit Design and Technology, ICICDT

Volumn , Issue , 2005, Pages 187-194

  Collaert, N ^a   Brus, S ^a   De Keersgieter, A ^a   Dixit, A ^b   Ferain, I ^b   Goodwin, M ^c   Kottantharayil, A ^a   Rooyackers, R ^a   Verheyen, P ^a   Yim, Y ^d   Zimmerman, P ^e   Beckx, S ^a   Degroote, B ^a   Demand, M ^a   Kim', M ^d   Kunnen, E ^a   Locorotondo, S ^a   Mannaert, G ^a   Neuilly, F ^f   Shamiryan, D ^a   Baerts, C ^a   Ercken, M ^a   Laidler, D ^a   Leys, F ^a   Loo, R ^a   Lisoni, J ^a   Snow, J ^a   Vos, R ^a   Boullart, W ^a   Pollentier, I ^a   De Gendt, S ^a   De Meyer, K ^b   Jurczak, M ^a   Biesemans, S ^a   more..

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c TEXAS INSTRUMENTS   (United States)

^d SAMSUNG Electronics   (South Korea)

^e Intel Corporation Belgium   (Belgium)

^f PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 25844498896     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/icicdt.2005.1502627     Document Type: Conference Paper

References (21)

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