Thermal and mechanical phenomena in micromechanical optics

Journal of Physics D: Applied Physics

Volumn 37, Issue 10, 2004, Pages

  Talghader, Joseph J ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; DEFORMATION; ELASTIC MODULI; HEAT CONDUCTION; HEAT TRANSFER; OPTICS; RADIATION EFFECTS; SENSITIVITY ANALYSIS; THERMAL CONDUCTIVITY; THIN FILMS;

MECHANICAL DEVICES; MECHANICAL PHENOMENA; MICROMIRROR; THERMAL PHENOMENA;

THERMAL EFFECTS;

EID: 2542540655     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/10/R01     Document Type: Review

References (43)

1. Chapman A J 1984 Heat Transfer 4th edn (New York: Macmillan)
2. Holman J P 1990 Heat Transfer 7th edn (New York: McGraw-Hill)
3. Krieth F and Bohn M S 2001 Principles of Heat Transfer 6th edn (Pacific Grove, CA: Brooks/Cole)
4. Fricke K 1994 A micromachined mass-flow sensor with integrated electronics on GaAs Sensors Actuators A 45 91-4
5. Gamage S K, Okulan N and Henderson H T 2002 A silicon thermal astable multivibrator for flow and temperature sensing IEEE Trans. Electron Devices 49 2355-8
6. Milanovic V, Bowen E, Zaghloul M E, Tea N H, Suehle J S, Payne B and Gaitan M 2000 Micromachined convective accelerometers in standard integrated circuits technology Appl. Phys. Lett. 76 508-10
7. Luo X B, Li Z X, Guo Z Y and Yang Y J 2002 Thermal optimization on micromachined convective accelerometer Heat Mass Transfer 38 705-12
8. Wu M S, Vail E C, Li G S, Yuen W and Chang-Hasnain C J 1996 Widely and continuously tunable micromachined resonant cavity detector with wavelength tracking IEEE Photon. Technol. Lett. 8 98-100
9. Lin S-Y, Fleming J G, Chow E, Bur J, Choi K K and Goldberg A 2000 Enhancement and suppression of thermal emission by a three-dimensional photonic crystal Phys. Rev. B-Condensed Matter 62 R2243-6
10. Mastrangelo C H, Muller R S and Kumar S 1991 Microfabricated incandescent lamps Appl. Opt. 30 868-73
11. Wood R A 1997 Monolithic silicon microbolometer arrays Uncooled Infrared Imaging Systems and Arrays ed P W Kruse and D D Skatrud Semiconductors and Semimetals vol 47 (New York: Academic) chapter 3, pp 43-121
12. Kruse P W, McGlauchlin L D and McQuistan R B 1962 Elements of Infrared Technology (New York: Wiley)
13. Eriksson P, Andersson J Y and Stemme G 1997 Thermal characterization of surface-micromachined silicon nitride membranes for thermal infrared detectors J. Microelectromech. Syst. 6 55-61
14. Supino R N and Talghader J J 2002 Average optical power monitoring in micromirrors IEEE J. Sci. Top. Quant. Electron. 8 12-18
15. Wahid S M S and Madhusudana C V 2000 Gap conductance in contact heat transfer Int. J. Heat Mass Transfer 43 4383-7
16. Song W B and Talghader J J 2002 Thermal contact conductance of actuated interfaces Technical Digest of the 2002 Solid State Sensor and Actuator and Microsystems Workshop (Hilton Head, SC, 3-7 June 2002) pp 329-32
17. Salgon J J, Robbe-Valloire F, Blouet J and Bransier J 1997 A mechanical and geometrical approach to thermal contact resistance Int. J. Heat Mass Transfer 40 1121
18. Parmenter K E and Marschall E 1995 Influence of surface preparation on thermal contact conductance of stainless steel and aluminum Exp. Heat Transfer 8 195
19. Wolff E G and Schneider D A 1998 Prediction of thermal contact resistance between polished surfaces Int. J. Heat Mass Transfer 41 3469
20. 4 contact Wear 177 25
21. O'Callaghan P W and Probert S D 1974 Thermal resistance and directional index of pressed contacts between smooth non-wavy surfaces J. Mech. Eng. Sci. 16 41-55
22. Mal'kov V A 1970 Thermal contact resistance of machined metal surfaces in a vacuum environment Heat Transfer-Soviet Research 2 24-33
23. Yovanovich M M 1981 New contact and gap conductance correlations for conforming rough surfaces AIAA Paper 81K-1164
24. Leung M, Hsieh C K and Goswami D Y 1998 Prediction of thermal contact conductance in vacuum by statistical mechanics J. Heat Transfer 120 51-7
25. Andrews M, Harris I and Turner G 1993 A comparison of squeeze-film theory with measurements on a microstructure Sensors Actuators A 36 79-87
26. Song W B and Talghader J J 2002 Adjustable responsivity for thermal infrared detectors Appl. Phys. Lett. 550-2
27. Supino R and Talghader J J 2001 Electrostatic control of microstructure thermal conductivity Appl. Phys. Lett. 78 1778-80
28. Ayazi F and Najafi K 2000 J. Microelectromech. Syst. 9 288-94
29. Kruse P W 1997 Semiconductors and Semimetals: Uncooled Infrared Imaging Arrays and Systems ed P W Kruse and D D Skatrud vol 47 (New York: Academic) chapter 10, pp 297-318
30. Cheng W, Shengrong F, Kai L, Shunchen P, Junhong S and Weiqi J 2000 SPIE-Int. Soc. Opt. Eng. Proc. SPIE - the International Society for Optical Engineering vol 4077, p 234
31. Wang H and Payzant E A 1999 Proc. SPIE - International Society for Optical Engineering vol 3700, p 377
32. McConnell A D, Uma S and Goodson K E 2001 J. Microelectromech. Syst. 10 360
33. Gere J M and Timoshenko S P 1997 Mechanics of Materials 4th edn (Boston, MA: PWS)
34. Ettouhami A, Essaid A, Ouakrim N, Michel L and Limouri M 1996 Thermal buckling of silicon capacitive pressure sensor Sensors Actuators A 57 167-71
35. Timoshenko S 1925 Analysis of bi-metal thermostats J. Opt. Soc. Am. 11233-55
36. Dunn M L, Zhang Y and Bright V M 2002 Deformation and structural stability of layered plate microstructures subjected to thermal loading J. Microelectromech. Syst. 11 372-84
37. Liu W and Talghader J J 2002 Thermally invariant dielectric coatings for micromirrors Appl. Opt. 41 3285-93
38. Cao K, Liu W and Talghader J J 2001 Curvature compensation in micromirrors with high reflectivity optical coatings IEEE J. Microelectromech. Syst. 10409-17
39. Vasudevan M and Johnson W 1962 On multimetal thermostats Appl. Sci. Res. Sect. B 9 420-30
40. Gabrielson T B 1993 Mechanical-thermal noise in micromachined acoustic and vibration sensors IEEE Trans. Electron Devices 40 903-9
41. Vig J R and Kim Y 1999 Noise in microelectromechanical system resonators IEEE Trans. Ultrasonics, Ferroelectrics, Frequency Control 46 1558-65
42. Tucker R S, Baney D M, Sonn W V and Flory C A 2002 Thermal noise and radiation pressure in MEMS Fabry-Perot tunable filters and lasers IEEE J. Sel. Top. Quantum Electron. 8 88-97
43. Kittel C and Kroemer H 1980 Thermal Physics 2nd edn (New York: Freeman) chapter 3